Bi-directional impulse chaos control in crystal growth
نویسندگان
چکیده
Mono-silicon crystals, free of defects, are essential for the integrated circuit industry. Chaotic swing in flexible shaft rotating-lifting (FSRL) system mono-silicon crystal puller causes harm to quality and must be suppressed growth procedure. From control viewpoint, constraints FSRL can summarized as not having measurable state variables feedback control, only one parameter is available manipulated, namely, rotation speed. application side, an additional constraint that should affect crystallization physical process little possible. These make chaos suppression a challenging task. In this work, analytical periodic solution derived using perturbation analysis. A bi-directional impulse method then proposed suppressing chaos. This does alter average It thus optimum regarding compared with single direction control. The effectiveness robustness uncertainties validated by simulations.
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ژورنال
عنوان ژورنال: Chaos
سال: 2021
ISSN: ['1527-2443', '1089-7682', '1054-1500']
DOI: https://doi.org/10.1063/5.0048096